Transmission-type electron microscope

Details Transmission-type electron microscope Transmission-type electron microscope

1987-06-08

1989-01-31

Howell, Janice A.

Radiant energy

Automatic/serial detection of similar sources

250397, G01N 2304, H01J 3722

Patent

active

048018015

ABSTRACT:
A transmission-type electron microscope comprises a lens system including an electron gun for producing an electron beam that is focused and directed to a specimen. The lens system forms a magnified electron optical image of the specimen from the electron beam transmitted through the specimen. A two-dimensional sensor is mounted in the plane in which the magnified image is formed, the sensor acting to store the energy of the electron beam impinging on it and to release the stored energy as light when illuminated with light or heated. An electron beam-deflecting means is mounted in the lens system and acting to tilt the focal plane in which the magnified lens image is formed, in such a way that a straight line extending from the main optical axis of the electron beam between the electron gun and the specimen does not interset the two-dimensional sensor.

REFERENCES:
patent: 3857035 (1974-12-01), Miller
patent: 4651220 (1987-03-01), Hosoi et al.

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