Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate
2007-09-11
2007-09-11
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
By light interference
Having wavefront division
Reexamination Certificate
active
10750986
ABSTRACT:
A wavefront measurement system includes a source of electromagnetic radiation. An imaging system directs the electromagnetic radiation at an object plane that it uniformly illuminates. A first grating is positioned in the object plane to condition the radiation entering the input of a projection optic. A projection optical system projects an image of the first grating onto the focal plane. A second grating is positioned at the focal plane that receives a diffracted image of the object plane to form a shearing interferometer. A CCD detector receives the image of the pupil of the projection optical system through the projection optical system and the second grating that forms a fringe pattern if there are aberrations in the projection optical system. Phaseshift readout of fringe pattern can be accomplished by stepping the first grating in a lateral direction and reading each frame with the CCD detector.
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The Search Report for Singapore Application No. 200400111-1, issued on Jun 5, 2004.
ASML Holding N.V.
Detschel Marissa J
Sterne Kessler Goldstein & Fox P.L.L.C.
Toatley Jr. Gregory J
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