Transmission lines and fabricating method thereof

Wave transmission lines and networks – Long lines – Shielded type

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333238, 333246, H05K 100

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active

056525575

ABSTRACT:
A transmission line including a dielectric or semi-insulating substrate; a groove in the substrate; a metallization film disposed on the bottom surface of the groove; a dielectric filling the groove and making contact with the metallization film; a wiring conductor film disposed on the dielectric; and a grounding metallization film disposed on the rear surface of the substrate. Excellent confinement of electromagnetic waves is achieved and electromagnetic wave interference between two neighboring lines is extremely small, realizing a high density arrangement of transmission lines and a compact and lightweight microwave/millimeter wave integrated circuit. Higher modes of electromagnetic wave propagation are avoided by controlling the thickness of the dielectric filling the groove while the thickness of the substrate remains arbitrary, thereby improving production yield and reliability.

REFERENCES:
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patent: 4772864 (1988-09-01), Otto et al.
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patent: 5304959 (1994-04-01), Wisherd et al.
patent: 5426399 (1995-06-01), Matsubayashi et al.
Translation of JP 1,125,101 into English pp. 1-9.
Lo et al, "Resonant Phenomena In Conductor-Backed Coplanar Wave-guides (CBCPW's)", IEEE Transactions on Microwave Theory and Techniques, vol. 41, No. 12, 1993, pp. 2099-2108.

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