Transmission electron microscope sample preparation

Details Transmission electron microscope sample preparation Transmission electron microscope sample preparation

2005-01-11

2005-01-11

Evans, Geoffrey S. (Department: 1725)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C219S121690

Reexamination Certificate

active

06841788

ABSTRACT:
Sample preparation apparatus and method includes a wafer stage platform with an optical microscope and integrated pattern recognition to automatically address specific locations on the wafer sample of interest. A laser attaches to the optical microscope to mill a set pattern around the area of interest. A precision micro-manipulator engages the sample support structure, extracts the structure, and places the structure in a TEM holder or holder tip. The holder or holder tip can then be placed inside a FIB for final thinning, followed by direct transfer into the TEM.

REFERENCES:
patent: 5059764 (1991-10-01), Baer
patent: 5208437 (1993-05-01), Miyauchi et al.
patent: 5350921 (1994-09-01), Aoyama et al.
patent: 5656186 (1997-08-01), Mourou et al.
patent: 5922224 (1999-07-01), Broekroelofs
patent: 6300631 (2001-10-01), Shofner
patent: 6489589 (2002-12-01), Alexander
patent: 20040016888 (2004-01-01), Haraguchi
patent: 9-96595 (1997-04-01), None
patent: 11-145087 (1999-05-01), None
patent: 11-160210 (1999-06-01), None
patent: 2000-329663 (2000-11-01), None

Affiliated with

Also associated with

Rating

Transmission electron microscope sample preparation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Transmission electron microscope sample preparation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Transmission electron microscope sample preparation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3423911