Transmission electron microscope

Details Transmission electron microscope Transmission electron microscope

1984-02-29

1986-04-29

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

G21K 108, H01J 3700

Patent

active

045859426

ABSTRACT:
A transmission electron microscope having objective lens comprising upper, middle and lower magnetic pole pieces installed inside a yoke enveloping the first and second excitation coils. The polarity of the first magnetic field between the upper and middle magnetic pole piece is changed according to the selection of the two observation modes for an electron microscope image and for a converged beam diffraction pattern. However, the position of a specimen located at the midst of the second magnetic field between the middle and lower magnetic pole pieces is fixed during said two operation modes, so that analysis for a crystalline material of a very small area in the specimen is carried out by easy operation.

REFERENCES:
patent: 3851172 (1974-11-01), Ozasu et al.
patent: 4306149 (1981-12-01), Le Poole et al.

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