Translation mechanism for opto-mechanical inspection

Details Translation mechanism for opto-mechanical inspection Translation mechanism for opto-mechanical inspection

2007-04-10

2007-04-10

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

Triangulation

C356S607000

Reexamination Certificate

active

10962119

ABSTRACT:
An apparatus is disclosed for moving an optical component of an opto-mechanical inspection system relative to an object to be inspected using a linear actuator comprising a coil located in a magnetic field created by a magnet assembly. A translation stage is coupled to either of said coil and magnet assembly whereby the translation stage is configured for motion relative to the other of said coil and magnet assembly. Movement of the translation stage is configured along a plane that is substantially perpendicular to a direction of incident light projected from a light source through the optical component onto the object.

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