Transition radiation apparatus and method therefor

Details Transition radiation apparatus and method therefor Transition radiation apparatus and method therefor

2004-08-10

2008-08-05

Berman, Jack I. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

Reexamination Certificate

active

07408179

ABSTRACT:
In one embodiment of the present invention, intervening material layers (208) are recessed (304) relative to membrane layers (208) thereby providing increased surface area contact between the membranes (208) and support posts (408). Increased surface area contact assists in reducing membrane shape changes (122) and defects (124, 126) that can result from thermal and physical stress.In an alternative embodiment, problems related to stiction during release of a stack of membranes (208) is reduced by using different processes to completely remove portions of intervening material layers (206) between membrane layers (208). The first process removes the bulk of the intervening material layer (206). The second process removes the remaining portions of the intervening material layer (602).

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