Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2007-05-08
2007-05-08
Berman, Jack (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S50400H, C250S492300, C250S372000, C250S365000, C315S111810, C315S149000, C315S150000, C315S500000, C315S503000
Reexamination Certificate
active
10917819
ABSTRACT:
In one embodiment of the present invention, thermal deformation or bending of membranes in a transition radiation emitting structure can be reduced by providing flex regions in the membranes or the membrane support structures. In a second embodiment, deformation of membranes is compensated for by fabricating the membranes to cooperatively bend in a similar manner and direction. In a third embodiment, deformation of the membrane is reduced by fabricating the membranes with an intrinsic tensile or compressive stress.
REFERENCES:
patent: 2004/0183486 (2004-09-01), Goldstein
Shroff, Yashesh A., U.S. Appl. No. 10/915,809 entitled “Transition Radiation Apparatus and Method Therefor,” filed Aug. 10, 2004, 37 pages including drawings.
Shroff, “Transition Radiation Apparatus and Method Therefor” U.S. Patent Application (serial number not yet assigned), filed Aug. 10, 2004.
Knulst et al., “Observation of narrow-band Su L-edge Cerenkov radiation generated by 5 MeV electrons”, Applied Physics Letters, vol. 79, No. 18, pp. 2999-3001, Oct. 29, 2001.
Knulst et al., “High-brightness, narrowband and compact, soft x-ray Cherenkov sources in the water window”, Applied Physics Letters, vol. 83, No. 19, pp. 4050-4052, Nov. 10, 2003.
Cherry et al., “The Efficient Identification of Relativistic Particles by Transition Radiation”, Nuclear Instruments and Methods, vol. 115, pp. 141-150, 1974.
Yuan et al., “Energy Dependence of X-Ray Transition Radiation from Ultrarelativistic Charged Particles”, Physics Letters, vol. 31B, No. 9, pp. 603-605, Apr. 27, 1970.
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Krautschik Christof G.
Lee Sang H.
Shroff Yashesh A.
Berman Jack
Blakely , Sokoloff, Taylor & Zafman LLP
Hashmi Zia R.
Intel Corporation
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