Transistor having reduced hot carrier implantation

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device

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257240, 257288, 257368, 257333, H01L 2910

Patent

active

056799683

ABSTRACT:
A transistor having reduced hot carrier implantation is disclosed which is formed on an outer surface (12) of a semiconductor substrate (10). The transistor comprises a source region (22) and a drain region (24) which define there between a channel region (34). A gate insulator layer (14) insulates a gate conductor (16) from the channel region (34). A sidewall insulator body (20) is formed such that a thickened region of insulator separates an end of gate conductor (16) from a portion of channel region (34) proximate drain region (24). This thickened insulator reduces the local electric field in channel region (34) near drain region (24) and correspondingly reduces the implantation into gate insulator (14) of hot carriers generated from impact ionization.

REFERENCES:
patent: 3339128 (1967-08-01), Olmstead et al.
patent: 3719866 (1973-03-01), Naber et al.
patent: 4238758 (1980-12-01), Suzuki
patent: 4677739 (1987-07-01), Doering et al.
patent: 4866491 (1989-09-01), Solomon

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