Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Junction field effect transistor
Reexamination Certificate
2006-09-26
2006-09-26
Huynh, Andy (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Junction field effect transistor
C257S241000, C257S328000, C257SE29131, C257SE21693
Reexamination Certificate
active
07112832
ABSTRACT:
A transistor (10) overlies a substrate (12) and has a plurality of overlying channels (72, 74, 76) that are formed in a stacked arrangement. A continuous gate (60) material surrounds each of the channels. Each of the channels is coupled to source and drain electrodes (S/D) to provide increased channel surface area in a same area that a single channel structure is conventionally implemented. A vertical channel dimension between two regions of the gate (60) are controlled by a growth process as opposed to lithographical or spacer formation techniques. The gate is adjacent all sides of the multiple overlying channels. Each channel is formed by growth from a common seed layer and the source and drain electrodes and the channels are formed of a substantially homogenous crystal lattice.
REFERENCES:
patent: 4859623 (1989-08-01), Busta
patent: 5583362 (1996-12-01), Maegawa
patent: 5689127 (1997-11-01), Chu et al.
patent: 5965914 (1999-10-01), Miyamoto
patent: 6300182 (2001-10-01), Yu
patent: 6365465 (2002-04-01), Chan et al.
patent: 6372559 (2002-04-01), Crowder et al.
patent: 6413802 (2002-07-01), Hu et al.
patent: 2004/0063286 (2004-04-01), Kim et al.
patent: WO 00/21118 (2000-04-01), None
Monfray, S. et al; “50nm-Gate All Around (GAA)-Silicon On Nothing (SON)-Devices: A Simple Way to Co-Integration of GAA Transistors Within Bulk MOSFET Process”; 2002 Symposium on VLSI Technology; 2002; pp. 108-109; 2002 Symposium on VLSI Technology Digest of Technical Papers.
Monfray, S. et al.; “Highly-Performant 38nm SON (Silicon-On-Nothing) P-MOSFETs with 9nm-thick Channels”; 2002 IEEE International SOI Conference; Oct. 2002; pp. 20-22.
Monfray, S. et al.; “SON (Silicon-On-Nothing) P-MOSFETs with Totally Silicided (CoSi2) Polysilicon on 5nm-thick Si Films: The Simplest Way to Integration of Metal Gates on Thin FD Channels”; IEDM; 2002; pp. 263-266; IEEE.
Yu, Bin et al; “FinFET Scaling to 10nm Gate Length”; IEDM; 2002; pp. 251-254; IEEE.
Kedierski, Jakub et al.; “High—Performance Symmetric-Gate and CMOS-Compatible VtAsymmetric-Gate FinFET Devices”; IEEE; 2001; 4 pp.
Choi, Y. et al.; “Sub-20nm CMOS FinFET Technologies”; IEDM; 2001; pp. 19.1.1-19.1.4; IEEE.
Kim, K. et al.; “Double-Gate CMOS: Symmetrical-Versus Asymmetrical-Gate Devices”; IEEE Transactions on Electron Devices; Feb. 2001; pp. 294-299; vol. 48, No. 2; IEEE.
Monfray, S. et al.; “First SON (Silicon-On-Nothing) MOSFETs With Perfect Morphology and High Electrical Performance”; IEDM; 2001; pp. 29.7.1-29.7.4; IEEE.
Hisamoto, D. et al.; “FinFET—A Self-Aligned Double-Gate (MOSFET) Scalabe to 20nm”; IEEE Transactions of Electron Devices; Dec. 2000; pp. 2320-2325; vol. 47, No. 12; IEEE.
Jurczak, M. et al.; “Silicon-on-Nothing (SON)—an Innovative Process for Advanced CMOS”; IEEE Transactions on Electron Devices; Nov. 2000; pp. 2179-2187; vol. 47, No. 11; IEEE.
Fossum, J.G. et al.; “Extraordinarily High Drive Currents in Asymmetrical Double-Gate MOSFETs”; Superlattices and Microstructures; 2000; pp. 525-530; vol. 28; No. 5/6; Academic Press.
Jurczak, M. et al.; “SON (Silicon on Nothing)—A New Device Architecture for the ULSI Era”; Symposium of VLSI Technology Digest of Technical Papers; 1999; pp. 29-30.
Huang, X. et al.; “Sub 50-nm FinFET: PMOS”; IEDM; 1999; pp. 3.4.1-3.4.4; IEEE.
Hisamoto, D. et al.; “A Folded-Channel MOSFET for Deep-sub-tenth Micron Era”; IEDM; 1998; pp. 1032-1034; IEDM.
Tanaka, T. et al.; “Ultrafast Operation of Vth-Adjusted p+-n+Double-Gate SOI MOSFET's”; IEEE Electron Device Letters; Oct. 1994; pp. 386-388; vol. 15, No. 10; IEEE.
International Search Report.
Specification, abstract and drawings for U.S. Appl. No. 10/074,732, filed Feb. 13, 2002.
Mathew Leo
Orlowski Marius K.
Freescale Semiconductor Inc.
Huynh Andy
King Robert L.
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