Transferring device for semiconductor wafers

Details Transferring device for semiconductor wafers Transferring device for semiconductor wafers

1989-10-13

1991-10-01

Spar, Robert J.

Material or article handling

Horizontally swinging load support

Swinging about pivot

901 12, 901 19, B25J 1100

Patent

active

050528840

ABSTRACT:
Transferring device for a semiconductor wafer or like part includes a rotatable carrying arm rotatably for carrying a semiconductor wafer or part from its initial position and through a first angle. The rotatable carrying arm has a holding portion for a wafer or part, and a cam follower portion. A motor rotates the rotatable carrying arm through an angle slightly greater than the first angle slightly past a desired position for the wafer. Then, an eccentric cam returns the carrying arm through a second, incremental angle, for bringing the carrying arm, and, hence, the wafer held thereby, to the desired position.

REFERENCES:
patent: 3857496 (1974-12-01), Gonzales
patent: 4247244 (1981-01-01), Coyle

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