Transferring apparatus operated in a vacuum chamber

Details Transferring apparatus operated in a vacuum chamber Transferring apparatus operated in a vacuum chamber

1988-09-19

1991-03-12

Olszewski, Robert P.

Material or article handling

Vertically swinging load support

29740, 29744, 29759, 414751, 414783, B66C 2300

Patent

active

049988590

ABSTRACT:
A transferring apparatus comprises a vacuum chamber, a carrier member disposed inside a pipe which communicates with the vacuum chamber, magnetic means installed in a support structure which is moved by a driving means. The carrier member is floated and pulled in its axial direction by magnetic force produced by the magnetic means, whereby an object placed on the tip of a manipulator arm which is connected to the carrier member is transferred in the vacuum chamber. Since the carrier member is floated inside the pipe and moved in its axial direction without contact to the pipe or any other parts, there are no portions inside the pipe which relatively move in contact with each other, and thus fine particles are not generated inside the pipe. This effectively eliminates adhesion of fine particles to objects such as semiconductor devices being transferred in a vacuum chamber.

REFERENCES:
patent: 4542712 (1985-09-01), Sato et al.
patent: 4676884 (1987-06-01), Dimock et al.
patent: 4768911 (1988-09-01), Balter
patent: 4790258 (1988-12-01), Drage et al.

Affiliated with

Also associated with

Rating

Transferring apparatus operated in a vacuum chamber does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Transferring apparatus operated in a vacuum chamber, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Transferring apparatus operated in a vacuum chamber will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-445203