Transfer system in a clean room

Details Transfer system in a clean room Transfer system in a clean room

1987-02-25

1989-05-02

Basinger, Sherman D.

Conveyors: fluid current

With diverse power-driven conveyor

406 83, 406110, 406155, 406164, 406184, 414217, B65G 5132

Patent

active

048263605

ABSTRACT:
A transfer system for transferring a SMIF pod.TM. in a clean room, in which the pod is adapted to contain a wafer cassette. The transfer system includes: at least one pair of SMIF arms.TM., the arms disposed adjacent to a semiconductor processing apparatus for transferring wafers, carried in the wafer cassette, into and out of the semiconductor processing apparatus; a transfer tube disposed near the arms; a vehicle adapted to carry the pod and adapted to move within the transfer tube; evacuation mechanism for evacuating the transfer tube to produce a negative pressure within the transfer tube so that the vehicle is moved along an axis of the transfer tube due to the negative pressure; and at least one pair of conveying mechanisms for conveying the vehicle between the transfer tube and respective arms.

REFERENCES:
patent: 839646 (1906-12-01), Roberts
patent: 2893660 (1959-07-01), Cook et al.
patent: 4649830 (1987-03-01), Tanaka
patent: 4682927 (1987-07-01), Southworth et al.
patent: 4705444 (1987-11-01), Tullis et al.
patent: 4739882 (1988-04-01), Parikh et al.

Affiliated with

Also associated with

Rating

Transfer system in a clean room does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Transfer system in a clean room, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Transfer system in a clean room will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-581794