Material or article handling – Chamber of a type utilized for a heating function and... – Including driven device and/or inclined flow path to carry...
Patent
1996-03-13
1998-11-24
Keenan, James W.
Material or article handling
Chamber of a type utilized for a heating function and...
Including driven device and/or inclined flow path to carry...
414156, 414750, 414938, F27D 306
Patent
active
058398708
ABSTRACT:
An apparatus for preventing the cross contamination of heating element within horizontal furnaces is disclosed. A rotating spindle may connect to either or both of the lifting arm of a triaxial loader or the transfer plate of a loading station. A pair of spindles are able to lift a single wafer boat. Each spindle includes a plurality of active positions with one active position associated with each heating element of the horizontal furnace. A control processor monitors the position of the spindle and rotates the spindle to the active position associated with a heating element when a loading or unloading process is initiated for that heating element.
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Harrell John M.
Niemirowski Adam F.
Niemirowski George E.
Patel P. V.
Judson David H.
Keenan James W.
Novus Corporation
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