Transfer system and transfer method of object to be processed

Details Transfer system and transfer method of object to be processed Transfer system and transfer method of object to be processed

2006-03-15

2010-11-02

Crawford, Gene (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C414S935000, C700S218000

Reexamination Certificate

active

07826918

ABSTRACT:
A transfer method employs a transfer system including a semiconductor handling device and an automatic transfer device. The semiconductor handling device includes a first transfer mechanism and a first optically coupled parallel I/O communications interface. The automatic transfer device includes a second transfer mechanism and a second optically coupled parallel I/O communications interface. The transfer method includes a successive transfer notifying step wherein the automatic transfer device and the semiconductor handling device notify each other that a successive transfer is possible via an optical communications between the first and the second optically coupled parallel I/O communications interface in case where a plurality of objects to be processed are able to be successively transferred one by one between the first and the second transfer mechanism; and a successive transfer step wherein the objects are transferred one by one between the first and the second transfer mechanism.

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