Transfer method of functional region, LED array, LED printer...

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies

Reexamination Certificate

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C438S030000, C438S149000, C438S421000, C438S455000, C438S459000, C438S460000, C438S462000, C438S690000, C257S084000, C257S088000, C257S258000, C257S288000, C257SE21211, C257SE21409, C257SE21482, C257SE33001

Reexamination Certificate

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07943488

ABSTRACT:
A method includes placing a first bonding layer on at least one of a first functional region bonded on a release layer with a light releasable adhesive layer on a first substrate, and a transfer region on a second substrate; bonding the first functional region to the second substrate by the first bonding layer; irradiating the release layer with light with a light blocking member being provided to separate the first substrate from the first functional region at the release layer; placing a second bonding layer on at least one of a second functional region on the first substrate, and a transfer region on the release layer or a transfer region on a third substrate; bonding the second functional region to the second substrate or the third substrate by the second bonding layer; and separating the first substrate from the second functional region at the release layer.

REFERENCES:
patent: 6913985 (2005-07-01), Ogihara
patent: 7704765 (2010-04-01), Maruyama et al.
patent: 2001/0012677 (2001-08-01), Sameshima
patent: 2005/0059219 (2005-03-01), Tayanaka
patent: 2006/0246636 (2006-11-01), Imai et al.
patent: 2010/0165446 (2010-07-01), Danner et al.
patent: 2003-174041 (2003-06-01), None
patent: 2004-311765 (2004-11-01), None
patent: 2006-53171 (2006-02-01), None

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