Cleaning and liquid contact with solids – Processes – Combined
Patent
1996-08-02
1998-12-29
Achutamurthy, Ponnathapura
Cleaning and liquid contact with solids
Processes
Combined
134 76, 134 26, 134 32, 134 42, 134 84, 134 941, 118429, 118500, 118698, B08B 704, B08B 300, B08B 102
Patent
active
058534962
ABSTRACT:
A transfer machine having a pair of holding members disposed opposite to each other to hold a plurality of objects arranged at their peripheral edges. A drive mechanism selectively moves the holding members toward and away from each other in order to selectively hold and release the objects by the holding members. A transfer mechanism transfers the objects and the holding members to a bath in order to process the objects in the bath. Each of the holding members has a plurality of holding notches for holding the peripheral edges of the objects, and the notches are disposed in upper and lower holders which are arranged parallel to each other. The holding notches of the upper holder have a first taper part positioned adjacent an opening of the notch and a second taper part positioned adjacent a notch bottom, and the first taper part has an opening angle larger than an opening angle of the second taper part.
REFERENCES:
patent: 5301700 (1994-04-01), Kamikawa et al.
Achutamurthy Ponnathapura
Ponnaluri P.
Tokyo Electron Limited
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