Material or article handling – Device for emptying portable receptacle – For emptying contents thereof into portable receiving means
Patent
1995-07-27
1997-05-06
Merritt, Karen B.
Material or article handling
Device for emptying portable receptacle
For emptying contents thereof into portable receiving means
414331, 414416, 414937, 414941, B65G 6500
Patent
active
056264569
ABSTRACT:
A wafer transfer device for transferring wafers between a wafer boat having a plurality of ring-shaped support plates arranged one above another, and a cassette capable of supporting semiconductor wafers at different levels. The support plates have a hole in a center portion and define a vertical passage. Wafers are carried in a horizontal direction between the boat and the cassette by a carrying mechanism having at least two forks. A movable push-up disk is moved up and down through the passage by a drive device. The extension member extends through the passage and has an upper end portion supporting the push-up disk and a lower end portion connected to the drive device and located below a lowermost one of the support plates. A controller controls the carrying mechanism and the push-up disk in interlock fashion. Thereby, the forks are simultaneously moved forward or backward to move wafers horizontally into the cassette and position them at the different levels in the cassette or to move the wafers from the cassette, and are independently moved forward or backward to move the wafers horizontally into the boat and place them on the support plates or to move them from the boat.
REFERENCES:
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 5110248 (1992-05-01), Asano et al.
patent: 5162047 (1992-11-01), Wada et al.
patent: 5183370 (1993-02-01), Cruz
patent: 5221201 (1993-06-01), Yamaga et al.
patent: 5275521 (1994-01-01), Wada
patent: 5297910 (1994-03-01), Yoshioka et al.
Gordon Stephen
Merritt Karen B.
Tokyo Electron Limited
Tokyo Electron Tohoku Limited
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