Transfer device

Details Transfer device Transfer device

1994-02-16

1996-07-30

Williams, Hezron E.

Measuring and testing

Vibration

By mechanical waves

73634, 734321, 367 93, 367 97, 367105, 437247, G01N 2920, G01N 2922

Patent

active

055400981

ABSTRACT:
A transfer device an ultrasonic sensor having an oscillating section for oscillating an ultrasonic beam toward wafers which are horizontally arranged in a carrier and a receiving section for receiving a reflected ultrasonic wave, and driving mechanism for vertically moving the ultrasonic sensor relative to the carrier so as to sequentially radiate an ultrasonic beam to the end faces of the wafers. The presence/absence of a wafer and projection of the wafer in and from the carrier are detected based on the reflected wave received by the receiving section.

REFERENCES:
patent: 3737282 (1973-06-01), Hearn et al.
patent: 3960007 (1976-06-01), Swensen
patent: 4175441 (1979-11-01), Urbanek et al.
patent: 4276621 (1981-06-01), Hiruma et al.
patent: 4627291 (1986-12-01), Otsuki et al.
patent: 5048164 (1991-09-01), Harima
patent: 5177711 (1993-01-01), Yamaguchi et al.
patent: 5231608 (1993-07-01), Matsui

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