Transfer chamber for flat display device manufacturing...

Details Transfer chamber for flat display device manufacturing... Transfer chamber for flat display device manufacturing...

2004-11-01

2010-02-23

Lowe, Michael S (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S225010, C414S744100, C414S939000, C414S941000, C901S030000

Reexamination Certificate

active

07665946

ABSTRACT:
A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may combine functions of a transfer chamber and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, and a buffer may be provided so as to avoid interference with the robot. An aligner may adjust a position of a substrate mounted on the buffer.

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