Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2008-05-29
2010-02-23
Fox, Charles A (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
Reexamination Certificate
active
07665947
ABSTRACT:
A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may provide a combination of the functions of a transfer and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, a buffer may be provided and be driven without interference with the robot, and an aligner may be provided to adjust a position of a substrate mounted on the buffer. A sealing member may be provided to seal a hole formed at a predetermined portion of the transfer chamber.
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Choi Jun Young
Hur Gwang Ho
Lee Cheol Won
Lee Sang Baek
Advanced Display Process Engineering Co. Ltd.
Fox Charles A
KED & Associates LLP
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