Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1997-07-14
1999-11-02
Ellis, Christopher P.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414773, 414778, 414783, 414411, 414811, 414816, 414939, 414940, F24F 700
Patent
active
059758252
ABSTRACT:
A transfer device for wafers stacked in magazines has a vertically displaceable frame of a platform, with which the cover of the box surrounding the magazine in the closed condition. The magazine remains in the original position on the base of the box and is then supplied by a gripping device from this position to a processing system in which the wafers are removed from the magazine and are processed. A gripping device preferably has two extension arms arranged on both sides of the magazine as well as one stop element which can be caused to impact on the wafer edges. The stop element preferably has two lips consisting of an elastic material which lips can be caused to impact on the wafer edges. The device permits a very fast loading and unloading into or out of the processing system.
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patent: 4705444 (1987-11-01), Tullis et al.
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patent: 5547328 (1996-08-01), Bonora et al.
patent: 5655869 (1997-08-01), Scheler et al.
patent: 5674039 (1997-10-01), Walker et al.
Bachmann Rolf
Blattner Jakob
Schmid Hans
Ellis Christopher P.
Hess Douglas
Tec-Sem AG
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