Transfer apparatus for plate-like member

Details Transfer apparatus for plate-like member Transfer apparatus for plate-like member

1988-10-21

1990-07-17

Spar, Robert J.

Material or article handling

Load carried along a horizontal linear path

Having gripper means

414280, B65G 100

Patent

active

049418009

ABSTRACT:
A transfer apparatus for carrying a semiconductor wafer into a wafer cassette comprising an arm to load a semiconductor wafer thereon, a moving mechanism to move the arm to a wafer cassette, a chucking device to have a wafer attracted to the arm, and an auxiliary mechanism to push a wafer and adjust the position of the wafer to the inlet of a wafer cassette when the wafer comes into contact with the side wall of the wafer cassette.

REFERENCES:
patent: 2672249 (1954-03-01), Ulinski
patent: 4103232 (1978-07-01), Sugita et al.
patent: 4557659 (1985-12-01), Scaglia
patent: 4561688 (1985-12-01), Tsutsui
patent: 4566726 (1986-01-01), Correnti et al.
patent: 4657470 (1987-04-01), Clarke et al.
patent: 4777781 (1988-10-01), Doster et al.
patent: 4789295 (1988-12-01), Boucher, Jr. et al.
patent: 4805950 (1989-02-01), Haroutel et al.

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