Transfer apparatus for compensating for a transfer error

Details Transfer apparatus for compensating for a transfer error Transfer apparatus for compensating for a transfer error

1982-12-16

1985-09-03

Rosenberger, R. A.

Optics: measuring and testing

By alignment in lateral direction

With light detector

356401, 355 52, 355 53, G03F 900

Patent

active

045389144

ABSTRACT:
Disclosed is a transfer apparatus provided with a first body having a plurality of alignment marks, a second body having a plurality of alignment marks, a projection optical system for projecting the image of the first body upon the second body, a probing device for probing the alignment marks of the first body and probing the alignment marks of the second body through the projection optical system, an operation device electrically coupled to the probing device and deriving a transfer error from the alignment error of the alignment marks, and a compensation device coupled to the operation device for eliminating the transfer error and for compensating for the projection optical system.

REFERENCES:
patent: 3989385 (1976-11-01), Dill et al.
patent: 4123150 (1978-10-01), Sziklas
patent: 4127777 (1978-11-01), Binder
patent: 4275306 (1981-06-01), Kato et al.
patent: 4316668 (1982-02-01), Miller
patent: 4348750 (1982-09-01), Schwind
patent: 4362385 (1982-12-01), Lobach

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