Transfer apparatus for and method of transferring substrate

Details Transfer apparatus for and method of transferring substrate Transfer apparatus for and method of transferring substrate

1996-10-04

1998-03-24

Underwood, Donald W.

Material or article handling

Apparatus for charging a load holding or supporting element...

With simultaneous charging and discharging of plural load...

414416, 414937, B65H 500

Patent

active

057305749

ABSTRACT:
A transfer apparatus is adapted for transferring a substrate between two processing sections and includes two storage cassettes and two transfer robots. A first storage cassette has an insertion opening inserted in a first direction and a withdrawal opening oriented in a second direction, where the first and second directions intersect. A second storage cassette has an insertion opening oriented in a third direction and a withdrawal opening oriented in a fourth direction which fourth direction intersects the third direction. A first transfer device transfers a substrate from one of the two processing sections to the first storage cassette through the insertion opening of the first storage cassette and then transfers a substrate from the second storage cassette to the one processing section via the withdrawal opening of the second storage cassette. A second transfer device transfers a substrate from the first storage cassette to the other processing section via the withdrawal opening of the first storage cassette and then transfers a substrate from the other processing section to the second storage cassette through the insertion opening of the second storage cassette.

REFERENCES:
patent: 4836733 (1989-06-01), Hertel et al.
patent: 5177514 (1993-01-01), Ushijima et al.
patent: 5332352 (1994-07-01), Poduje et al.
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5445491 (1995-08-01), Nakagawa et al.
patent: 5478195 (1995-12-01), Usami

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