Transfer apparatus

Details Transfer apparatus Transfer apparatus

2006-01-24

2006-01-24

Underwood, Donald W. (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C414S749100, C901S015000, C074S490090

Reexamination Certificate

active

06988867

ABSTRACT:
There is provided a transfer apparatus capable of increasing the length of a transfer arm when it is extended, without increasing the size of the transfer arm when it is contracted. The transfer apparatus4comprising a transfer arm17which comprises: two rotating shafts5and6arranged coaxially or in parallel; a pair of first arms7and8, one end portions of which are fixed to the rotating shafts5and6, respectively; a pair of second arms10and11, one end portions of which are connected to the other end portions of the pair of first arms7and8by means of pins, respectively; and a holding portion14for holding an object w to be processed, the holding portion14being connected to each of the other end portions of the pair of second arms10and11by means of pins, wherein the second arms10and11cross each other.

REFERENCES:
patent: 5180276 (1993-01-01), Hendrickson
patent: 5447409 (1995-09-01), Grunes et al.
patent: 5720590 (1998-02-01), Hofmeister
patent: 4-129685 (1992-04-01), None
patent: 6-15592 (1994-01-01), None
patent: WO 00/05762 (2000-02-01), None
ISSM '96 article, “A Water-handling Interface that operates under Process Chamber Ambient Conditions”, Oct. 1996.

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