Material or article handling – Process – Of moving material between zones having different pressures...
Reexamination Certificate
2011-05-17
2011-05-17
Adams, Gregory W (Department: 3652)
Material or article handling
Process
Of moving material between zones having different pressures...
C414S217000
Reexamination Certificate
active
07942622
ABSTRACT:
In a vacuum transfer chamber10, a position detecting mechanism33for detecting the positions of semiconductor wafers W is arranged. The semiconductor wafers W disposed at predetermined positions in a load lock chamber17and vacuum processing chambers11to16are transferred to the position detecting mechanism33by a vacuum transfer mechanism30and the positions of the wafers are detected. Then, based on the detection results, aligning between the load lock chamber17and the vacuum processing chambers11to16is performed.
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Koizumi Hiroshi
Kondoh Keisuke
Adams Gregory W
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Snelting Jonathan D
Tokyo Electron Limited
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