Transducing device for accurately transducing a physical quantit

Details Transducing device for accurately transducing a physical quantit Transducing device for accurately transducing a physical quantit

1991-02-08

1993-03-16

Myracle, Jerry W.

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

73727, G01B 716

Patent

active

051933942

ABSTRACT:
For transducing a physical quantity into an output electric signal, a transducing device comprises lower and upper dielectric substrates and a physical quantity sensor mounted on a predetermined portion of a substrate surface of the lower dielectric substrate for sensing the physical quantity to produce a sensed signal representative of the physical quantity. The upper dielectric substrate has an upper surface and a lower surface which is on a different portion of the substrate surface. In order to receive the sensed signal and produce the output electric signal, an electric circuit is mounted on the upper surface and electrically connected to the sensor through a bonding wire which is shorter than that used in a conventional device. The electric circuit (14) receives the sensed signal through the bonding wire (15) and produces the output electrical signal. The physical quantity may be fluid pressure which a fluid has and is higher or lower than atmospheric pressure. Alternatively, the physical quantity is a velocity which is given to the device. Preferably, the physical quantity sensor has a sensor thermal expansion coefficient substantially equal to a substrate thermal expansion coefficient of the lower dielectric substrate in a direction parallel to the substrate surface.

REFERENCES:
patent: 3817107 (1974-06-01), Shimada et al.
patent: 4314225 (1982-02-01), Tominaga et al.
patent: 4576052 (1986-03-01), Sugiyama
patent: 4576181 (1986-03-01), Wallace et al.
patent: 4747456 (1988-05-01), Kitagawa et al.

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