Transducer assembly for megasonic cleaning

Details Transducer assembly for megasonic cleaning Transducer assembly for megasonic cleaning

1977-05-25

1978-10-03

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

29 2535, 310334, 366114, H01L 4110

Patent

active

041186494

ABSTRACT:
A transducer assembly adapted to oscillate at an ultrasonic frequency comprises a metallic foil having a back surface, at least one transducer having one face thereof mounted adjacent to the back surface by conductive means disposed therebetween, and insulating means disposed in the area adjacent to the back surface and surrounding the edges of the transducer for supporting the foil and transducer in relatively fixed relationship.

REFERENCES:
patent: 2865016 (1958-12-01), Hudimac et al.
patent: 2911484 (1959-11-01), Spitzer et al.
patent: 3239696 (1966-03-01), Burkhalter et al.
patent: 3376438 (1968-04-01), Colbert
patent: 3396286 (1968-08-01), Anderson et al.
patent: 3510698 (1970-05-01), Massa

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