Transducer apparatus employing convoluted semiconductor diaphrag

Details Transducer apparatus employing convoluted semiconductor diaphrag Transducer apparatus employing convoluted semiconductor diaphrag

1983-03-07

1984-08-28

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73DIG4, 338 4, 338 42, G01L 906

Patent

active

044676565

ABSTRACT:
A pressure transducer employing a semiconductor diaphragm having a convoluted central section surrounded by a rigid peripheral section. The convolutions are a series of concentric grooves formed as squares producing a square nonplanar diaphragm in the preferred embodiment. The convolutions are formed on the semiconductor wafer by an anisotropic etch. Piezoresistive devices are diffused into the diaphragm in the peripheral region to form a bridge array. The transducer structure thus formed is capable of producing a linear and large magnitude voltage signal in response to a relatively small applied pressure or force.

REFERENCES:
patent: 3654579 (1972-04-01), Kurtz et al.
patent: 4241325 (1980-12-01), DiGiovanni
patent: 4400869 (1983-08-01), Wilner et al.

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