Transducer and method of making the same

Details Transducer and method of making the same Transducer and method of making the same

1979-05-29

1980-10-28

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73723, 73778, G01L 1100

Patent

active

042299799

ABSTRACT:
A silicon transducer including a silicon frame with one or more lands extending from a diaphragm or the like. The lands are interconnected by two thin strips formed integrally with the lands. The strips are essentially the transducer. The transducer is constructed by etching a boron doped wafer with a mixture of catechol, ethylene diamine and water.

REFERENCES:
patent: 3399572 (1968-09-01), Riordan
patent: 3672220 (1972-06-01), Agar
patent: 4074576 (1978-02-01), Bryzzhev et al.

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