Touch probe including a waveguide

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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Details

25022719, 25022721, G01N 2186, G01V 904, H01J 516

Patent

active

051189569

ABSTRACT:
A touch-trigger probe is provided with a sensor (which may be a mirror (106), an optical fibre (206), or a bi-refringent element (307)) which changes state by vibrating or undergoing strain when a stylus connected to the probe contacts a workpiece. The sensor is typically provided on (in the case of the mirror (106)), or in (in the case of the optical fibre (206)) the stylus. The change of state of the sensor causes a change in the path length, polarization state, or intensity of light waves conveyed by the sensor. An interferometer may be provided to detect such changes. Other forms of electromagnetic waves may be used to the same effect.

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patent: 5018280 (1991-05-01), Enderle et al.

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