Total tool control for semiconductor manufacturing

Details Total tool control for semiconductor manufacturing Total tool control for semiconductor manufacturing

2007-11-06

2007-11-06

Raymond, Edward (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C714S025000

Reexamination Certificate

active

11342759

ABSTRACT:
The present invention provides a method and apparatus for controlling processing tools and related control units. The method includes accessing information indicative of at least one excursion of at least one processing tool detected by a first control unit associated with the at least one processing tool. The method also includes determining at least one action to be taken by at least one second control unit associated with the at least one processing tool based on the information indicative of said at least one excursion.

REFERENCES:
patent: 6999836 (2006-02-01), Schwarm et al.
patent: 7030957 (2006-04-01), Dishon et al.

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