Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate
2003-05-19
2004-11-02
Cherry, Euncha P. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
C359S223100
Reexamination Certificate
active
06813049
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a torsional rocking structural component for use in an optical scanner, angular acceleration sensor, and the like.
A torsional rocking structural component is a structure in which a movable member is supported by a torsion spring structure. Examples of a device using the torsional rocking structural component include an optical scanner manufactured by a semiconductor process.
U.S. Pat. No. 5,606,447 titled “PLANAR TYPE MIRROR GALVANOMETER AND METHOD OF MANUFACTURE” issued to Asada et al. on Feb. 25, 1997 discloses an electromagnetic driving actuator in which a torsional rocking structural component is used. As shown in
FIGS. 36 and 37
, an actuator
1
is provided with a flat movable plate
5
, two torsion bars
6
a
,
6
b
for rockably supporting the movable plate
5
, and a frame
2
for holding the torsion bars
6
a
,
6
b
, and these members are integrally formed from a silicon substrate. The movable plate
5
includes: a flat coil
7
, disposed on an upper surface peripheral edge of the plate, for generating a magnetic field from a power supply; and a total reflection mirror
8
disposed on an upper surface middle portion of the plate surrounded by the flat coil
7
.
As shown in
FIG. 37
, upper and lower glass substrates
3
and
4
are disposed on upper and lower surfaces of the frame
2
, and permanent magnets
10
a
,
11
a
and
10
b
,
11
b
for exerting a magnetic field onto the flat coil
7
are fixed at predetermined positions of the upper and lower glass substrates
3
and
4
.
Furthermore, as shown in
FIG. 36
, the frame
2
is provided with a pair of electrode terminals
9
a
,
9
b
disposed on the upper surface of the frame, and the electrode terminals
9
a
,
9
b
are electrically connected to the flat coil
7
via coil wirings
12
a
,
12
b
extending along the respective upper surfaces of the torsion bars
6
a
,
6
b
. The flat coil
7
, electrode terminals
9
a
,
9
b
and coil wirings
12
a
,
12
b
are simultaneously formed on the silicon substrate by an electroforming method.
As compared with a conventional actuator, the electromagnetic actuator can be remarkably thinned.
In general, in the torsional rocking structural component disclosed in U.S. Pat. No. 5,606,447, a stress acts on the wiring due to a torsional movement. In this case, the wiring resistance changes, and in a worst case the wiring is sometimes disconnected by metal fatigue.
BRIEF SUMMARY OF THE INVENTION
The present invention has been developed to solve the problem, and an object thereof is to provide a torsional rocking structural component in which the influence of stress generated by repeated torsional movements is reduced.
Additional objects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objects and advantages of the invention may be realized and obtained by means of the instrumentalities and combinations particularly pointed out hereinafter.
REFERENCES:
patent: 4421381 (1983-12-01), Ueda et al.
patent: 5606447 (1997-02-01), Asada et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 6122089 (2000-09-01), Minamoto et al.
patent: 6188504 (2001-02-01), Murakami et al.
Hidaka Toshiharu
Miyajima Hiroshi
Cherry Euncha P.
Olympus Corporation
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