Torsion resonator and filter using this

Details Torsion resonator and filter using this Torsion resonator and filter using this

2008-04-15

2008-04-15

San Martin, J. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S365000

Reexamination Certificate

active

10592437

ABSTRACT:
The invention provides a high-frequency torsion vibrator which can excite efficiently without having any paddle. The torsion vibrator is configured as a beam structure having an almost constant section and having no paddle and is disposed so as to be close to an electrode via a gap on the side surface of the beam thereof. An electrostatic capacitance between the vibrator and the electrode is adjusted so that the changing amount of the electrostatic capacitance per unit torsion vibration amount becomes maximum or the changing ratio of the electrostatic capacitance per unit AC voltage becomes maximum. This adjustment is made possible by controlling the thickness of the electrode in the case of using the semiconductor process. Further, when the vibrator is formed by monocrystalline silicon and the processing of the beam shape is performed by the anisotropic etching, the fine resonator which has a high Q value and has excellent surface property can be generated.

REFERENCES:
patent: 7061063 (2006-06-01), Kato et al.
patent: 2002/0105393 (2002-08-01), Clark et al.
patent: 10-512046 (1998-11-01), None
patent: 2003-222817 (2003-08-01), None
patent: 2004-247051 (2004-09-01), None
Yasumura et al., “Quality Factors in Micron- and Submicron-Thick Cantilevers”, Journal of Microelectromechanical Systems, vol. 9, No. 1, Mar. 2000, pp. 117-125.
Bannon et al., “ High-Q HF Microelectromechanical Filters”, IEEE Journal of Solid-State Circuits, vol. 35, No. 4, Apr. 2000, pp. 512-526.

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