Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1994-12-19
1996-02-06
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351436, G01P 15125
Patent
active
054888646
ABSTRACT:
A capacitive-type torsion beam accelerometer sensor element exhibiting improved stability contains slots in the heavy side of the rotatable sensing element which serve to alter the geometry of the heavy side capacitor such that the electrical geometry substantially coincides with the physical geometry of the substrate's fixed conductive plate in the presence of charge spreading. The slots also permit ingress and egress of air, thus extending the frequency response.
REFERENCES:
patent: 4483194 (1984-11-01), Rudolf
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4736629 (1988-04-01), Cole
patent: 5220835 (1993-06-01), Stephan
Ford Motor Company
May Roger L.
Oda Christine K.
Stock Daniel M.
Williams Hezron E.
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