Torsion beam accelerometer

Details Torsion beam accelerometer Torsion beam accelerometer

1991-09-12

1993-06-22

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73514, G01P 15125

Patent

active

052208354

ABSTRACT:
A semiconductor accelerometer having a sensor element supported by a pedestal coupled to a substrate. Coupling between the pedestal and the sensor element includes opposing torsion beams along the axis of flexure coupled through a spring to the pedestal. The spring includes a pair of beams extending in a direction perpendicular to the torsion beams so that thermal expansion applies a tensile force to the torsion beams.

REFERENCES:
patent: 3478604 (1969-11-01), Evans
patent: 3498138 (1970-03-01), Stewart
patent: 4483194 (1984-11-01), Rudolf
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4736629 (1988-04-01), Cole
L. Spangler & K. D. Wise, "A New Silicon-on-Glass Procedure for Integrated Sensors," IEEE Sensor and Actuator Work Shop, Hilton Head, pp. 140-142, Jun. 1988.

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