Torque sensor

Details Torque sensor Torque sensor

2007-12-04

2007-12-04

Thompson, Jewel (Department: 2855)

Measuring and testing

Dynamometers

Reexamination Certificate

active

11233879

ABSTRACT:
A plurality of acoustic wave sensing devices can be provided, which are mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate is appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of torque SAW sensing resonators can then be located upon the quartz wafer substrate, which is based upon previously mechanically simulated devices for implementation upon the substrate, together with a quartz cover to thereby produce a quartz torque sensor package from the quartz wafer substrate.

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Bill Drafts, Acoustic Wave Technology Sensors, IEEE Transactions on Microwave Theory and Techniques, Piscataway NJ, US, vol. 49, No. 4, Apr. 2001.

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