Torque magnetometer utilizing integrated piezoresistive levers

Electricity: measuring and testing – Magnetic – With means to create magnetic field to test material

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73862338, 324226, 324259, 324261, 324262, G01R 3312, G01R 3302, G01N 2772, G01L 118

Patent

active

057986410

ABSTRACT:
A torque magnetometer employing integrated piezoresistive levers to measure magnetization of very small anisotropic samples. A sample holding platform is cantilevered from the substrate by parallel legs on which piezoresistors have been applied. A Wheatstone bridge, which includes the piezoresistors, is completely integrated on a magnetometer substrate. Specific output connections are made to the electrical conductors of the bridge in a manner to eliminate Hall effect error signals in an alternative embodiment.

REFERENCES:
patent: 5107708 (1992-04-01), Seipler et al.
patent: 5182515 (1993-01-01), Okada
patent: 5542297 (1996-08-01), Mizuno
Tortonese et al., Atomic Resolution With An Atomic Force Microscope Using Piezoresistive Detection, Appl. Phys. Lett. 62(8), pp. 834-836 (1993).
Rossel et al., Active Microlevers as Miniature Torque Magnetometers, J. Appl. Phys., vol. 79, p. 8166 et seq. (1996).
Bauer et al., Miniature Torque Magnetometer, IBM Technical Disclosure Bulletin, vol. 38, No. 12, pp. 151, 152 (1995).

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