Topography sensor

Details Topography sensor Topography sensor

1988-04-25

1989-03-14

Noland, Tom

Measuring and testing

Surface and cutting edge testing

Roughness

73DIG4, G01B 734

Patent

active

048115940

ABSTRACT:
An apparatus and methods for use in measuring the topography of a surface by contact which comprises a piezoelectric polymer film sensor, such as polyvinyldiene difluoride film, with a body portion and a tip portion, with electrically conductive films adhered to each principal surface of the sensor, and a non-conductive support restraining the sensor a fixed distance from the surface to be measured and with the sensor having an arcuate form when flexed by the surface.

REFERENCES:
patent: 3792204 (1974-02-01), Murayama et al.
patent: 4001519 (1977-01-01), Rangabe
patent: 4050294 (1977-09-01), Andrews et al.
patent: 4053721 (1977-10-01), Nishikawa
patent: 4106333 (1978-08-01), Salje et al.
patent: 4162511 (1979-02-01), Toda et al.
patent: 4433386 (1984-02-01), Este
patent: 4669300 (1987-06-01), Hall et al.

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