Top side reference cavity for absolute pressure sensor

Details Top side reference cavity for absolute pressure sensor Top side reference cavity for absolute pressure sensor

2005-08-02

2005-08-02

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

06923069

ABSTRACT:
A pressure sensor includes a silicon diaphragm having bottom and topside surfaces. The bottom surface has been formed using methods known to those skilled in the art. A first layer is formed and patterned on the topside surface of the diaphragm having an area larger than the diaphragm. A second layer is formed and patterned over the first layer, the second layer being larger in area than the first layer. Holes formed in the second layer are used to remove the first layer using methods known to those skilled in the art. A third layer is formed and patterned over the second layer. The third layer seals the holes in the second layer creating a sealed cavity with a reference pressure on the topside surface of the diaphragm. During operation, media is applied to the bottom surface of the diaphragm wherein the media pressure can be sensed by the pressure sensor in relation to the reference pressure sealed on the topside of the diaphragm.

REFERENCES:
patent: 4951174 (1990-08-01), Grantham et al.
patent: 6164742 (2000-12-01), Hauck
patent: 6756248 (2004-06-01), Ikeda et al.
patent: 6773951 (2004-08-01), Eriksen et al.
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patent: 2003/0205090 (2003-11-01), Jakobsen
patent: 2003/0233884 (2003-12-01), Bodin
patent: 2004/0020303 (2004-02-01), Blomberg
patent: 2004/0021209 (2004-02-01), Sblono et al.

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