Top emitting VCSEL with etch stop layer

Details Top emitting VCSEL with etch stop layer Top emitting VCSEL with etch stop layer

1992-07-31

1994-03-08

Epps, Georgia Y.

Coherent light generators

Particular active media

Semiconductor

372 46, 372 96, 372 99, 437129, H01S 319

Patent

active

052933920

ABSTRACT:
A top emitting vertical cavity surface emitting laser with an etch stop layer positioned in the top mirror stack so the stack can be etched to form a trench surrounding a mesa with the emitting area on the mesa and the trench confining current flow and lasing to the mesa.

REFERENCES:
patent: 4830986 (1989-05-01), Plumb
patent: 5034092 (1991-07-01), Lebby et al.
patent: 5111467 (1992-05-01), Bradley
patent: 5115441 (1991-01-01), Kopf et al.

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