Tools for polishing and associated methods

Details Tools for polishing and associated methods Tools for polishing and associated methods

2007-07-10

2007-07-10

Nguyen, Dung Van (Department: 3723)

Abrading

Abrading process

With tool treating or forming

C451S527000, C451S539000

Reexamination Certificate

active

11357712

ABSTRACT:
Polishing tools and associated methods are disclosed. In one aspect, a method of polishing a work piece is provided. Such a method may include providing a polishing tool having asperities on a working surface, where the asperities have a tip-to-tip RA value of less than or equal to about 10 μm, and the working surface has a surface roughness RA value of less than or equal to about 50 μm. The method may further include contacting the tips of the asperities against an interface surface of the work piece and moving the tips of the asperities in a direction substantially parallel to the interface surface of the work piece such that the interface surface is polished.

REFERENCES:
patent: 6022268 (2000-02-01), Roberts et al.
patent: 6582283 (2003-06-01), James et al.
patent: 6899602 (2005-05-01), Fawcett et al.
patent: 6918820 (2005-07-01), Smith et al.
patent: 6932677 (2005-08-01), Nakano et al.
patent: 2003/0216111 (2003-11-01), Ohno et al.
patent: 2005/0020188 (2005-01-01), Saito et al.

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