Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
1999-07-02
2001-10-09
Lee, John R. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C356S400000
Reexamination Certificate
active
06300644
ABSTRACT:
FIELD OF THE INVENTION
The present invention relates generally to the field of semiconductor wafer manufacturing and more particularly to a tool for aligning a robot arm to a cassette for holding semiconductor wafers.
BACKGROUND OF THE INVENTION
Semiconductor wafers are moved into and out of cassettes by automated handling devices (robots) as part of the semiconductor manufacturing process. The cassettes hold the wafers while other wafers are being processed. The automated handling devices require a setup procedure to properly pick up wafers and to properly set wafers in the proper position. The setup procedure typically involves visually determining proper robot positions and recording these coordinates. A number of problems can occur when automated handlers and platforms are not properly setup. In the most severe case automated handlers can break wafers. Less severe misalignments can lead to wafer scratching and yield loss. The most common misalignment leads to wafers bumping into the cassette walls and scraping off particles.
Visual or eyeball alignment does not align to a standard. In addition, eyeball alignments cannot address issues related to platform level, robot end effector level, or a dynamic path that the end effector may follow. Finally, eyeball alignments are difficult, time consuming, and inaccurate.
Thus there exists a need for a device that provides a standard robot setup procedure, is fast, easy, accurate and can address issues such as dynamic path concerns.
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Beckhart Gordon Haggott
Conarro Patrick Rooney
Farivar-Sadri Kamran Michael
Harrell Kevin James
Krause Michael Charles
Halling Dale B.
Lee John R.
MicroTool, Inc.
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