TiW diffusion barrier for AuZn ohmic contact to P-Type InP

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H01L 2980

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050156039

ABSTRACT:
A low metal resistance ohmic contact alloyed to p InP material having TiW within the contact as a diffusion barrier layer between an underlay of AuZn and an overlay of Au. A process for fabricating an InP JFET containing a gate contact of respective AuZn, TiW, and Au layers and with the gate contact alloyed to p InP material of a semiconductive gate region provides an improved InP JFET having a low resistance metal alloyed ohmic contact to the gate region. Use of the TiW layer in a multilayer contact alloyed to P InP material leads to unique processing and improved InP semiconductor devices.

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Yamashita et al., J. Appl. Phys. 52 (12), Dec. 1961 pp. 7304-7306.
J. B. Boos et al. "Fully Ion Implanted InP Junction FET's", IEEE Electron vice Letters, vol. EDL-3, No. 9, Sep. 1982, pp. 256-258.
Tatsuyuki Sanaga et al. "Ohmic Contacts to p-GaAs with Au/Zn/Au Structure", Japanese Journal of Applied Physics, vol. 19, No. 8 Aug. 1980, pp. L491-L494.
F. A. Thiel et al., "Contacts to p-Type InP," J. Electrochem, Soc.: Solid-State Science and Technology, vol. 124, No. 2, Feb. 1977, pp. 317-318.
E. Kuphal, "Low Resistance Ohmic Contacts to n- And P-InP", Solid State Electronics, vol. 24, (1980), pp. 69-79.
"Low-Resistance Ohmic Contacts to p-InP" Electronics Letters, vol. 18, No. 17, Aug. 19, 1982, pp. 755-756.

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