Stock material or miscellaneous articles – All metal or with adjacent metals – Having metal particles
Patent
1992-07-16
1994-04-26
Walsh, Donald P.
Stock material or miscellaneous articles
All metal or with adjacent metals
Having metal particles
420430, 419 31, 419 33, 419 46, 419 47, 419 49, 419 52, B22F 316
Patent
active
053065697
ABSTRACT:
A titanium-tungsten target material capable of limiting the amount of particles generated during sputtering and a method of manufacturing this titanium-tungsten material. The titanium-tungsten target material has a titanium-tungsten alloy phase which occupies 98% or more of the whole area of the material as observed in a micro-structure thereof. In one example of the manufacturing method, an ingot obtained by melting tungsten and titanium is processde by a solution treatment to form a titanium-tungsten target, or a power obtained by melting the ingot is sintered to form a target. Preferably, the melting may be performed under reduced pressure in an electron beam melting manner. In another example of the manufacturing method, a powder is formed from a molten metal by an atomization method and the obtained powder is sintered to form a titanium-tungsten target. For sintering of the powder, it is preferable to apply hot isostatic pressing or hot pressing.
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Greaves J. N.
Hitachi Metals Ltd.
Walsh Donald P.
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