Titanium sputtering target

Details Titanium sputtering target Titanium sputtering target

1997-07-11

1999-11-30

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429813, 148421, 148669, C23C 1434

Patent

active

059936215

ABSTRACT:
Described is a titanium sputtering target to provide improved step coverage and a method of making same.

REFERENCES:
patent: 5798005 (1996-03-01), Murata et al.

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