Stock material or miscellaneous articles – Composite – Of quartz or glass
Patent
1985-02-19
1986-02-25
Childs, S. L.
Stock material or miscellaneous articles
Composite
Of quartz or glass
4271261, 427255, 4272551, 428698, 428701, B32B 900, B32B 1706
Patent
active
045728739
ABSTRACT:
The present invention relates to a titanium disulfide film fabricated on a substrate, where crystallites of titanium disulfide is oriented at an angle of their c-axis to the substrate surface of not more than 45.degree., and to a process for fabricating the film, where the film is prepared by chemical vapor deposition from TiCl.sub.4 and H.sub.2 S as source gases under an inner pressure of reaction tube of 30 kPa or less.
REFERENCES:
patent: 4007055 (1977-02-01), Whittingham
patent: 4058430 (1977-11-01), Suntola et al.
patent: 4203861 (1980-05-01), Thorp et al.
patent: 4259310 (1981-03-01), Clapper
patent: 4337239 (1982-06-01), Ruhs et al.
patent: 4364995 (1982-12-01), Crawford et al.
Pessa et al., "Characterization of Surface Exchange Readings Used to Grow Compound Films", Appl. Phys. Lett., vol. 38, pp. 131-132, Feb. 1981.
Kanehori Keiichi
Kudo Tetsuichi
Miyauchi Katsuki
Childs S. L.
Hitachi , Ltd.
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