Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Reexamination Certificate
2006-11-01
2009-12-15
Gonzalez, Porfirio Nazario (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
C427S248100
Reexamination Certificate
active
07632958
ABSTRACT:
Objects of the present invention are to provide a novel titanium complex that has good vaporization characteristics and an excellent thermal stability, and becomes a raw material for forming a titanium-containing thin film by methods such as CVD method or ALD method, its production method, a titanium-containing thin film formed using the same, and its formation method. In the invention, a titanium complex represented by the general formula (1) is produced by reacting a diimine represented by the general formula (2) and metallic lithium, and then reacting a tetrakisamide complex represented by the general formula (3).(In the formulae, R1and R4represent an alkyl group having from 1 to 6 carbon atoms. R2and R3each independently represents a hydrogen atom or an alkyl group having from 1 to 3 carbon atoms. R5and R6each independently represents an alkyl group having from 1 to 4 carbon atoms.).
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Extended European Search Report dated Sep. 23, 2008.
Chiba Hirokazu
Furukawa Taishi
Inaba Koichiro
Oshima Noriaki
Tada Ken-ichi
Gonzalez Porfirio Nazario
Sagami Chemical Research Center
Sughrue & Mion, PLLC
Tosoh Corporation
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