Titania-silica glass

Details Titania-silica glass Titania-silica glass

2007-10-18

2009-02-03

Green, Anthony J (Department: 1793)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S055000, C065S017100, C065S030100, C065S030130, C065S032100, C065S033100

Reexamination Certificate

active

07485593

ABSTRACT:
To provide titania-silica glass which is transparent glass of low thermal expansion, in particular, is of a low thermal expansion coefficient over a wide range of temperatures of 0 to 100° C. (an operating temperature range) when it is used as a photomask or a mirror material in extreme ultraviolet ray lithography, and which is excellent in homogeneity within the field and stability.Titania-silica glass is used which has 8 to 10% by weight of titania and 90 to 92% by weight of silica, where a Ti3+concentration is 10 to 60 ppm by weight.

REFERENCES:
patent: 60-176945 (1985-09-01), None
patent: 2003-505876 (2003-02-01), None
patent: WO2006/004169 (2006-01-01), None
patent: WO2006/080241 (2006-08-01), None

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